The Brooks MF53S/A32RD2B3LA1B1 PR5F6417 is a high-performance mass flow controller designed for precise gas flow measurement and control in industrial applications.
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The Brooks MF53S/A32RD2B3LA1B1 PR5F6417 is part of the MF-series Smart Mass Flow Controllers, offering a wide flow range from 100 to 2500 standard liters per minute (SLPM) with a turndown ratio of 25:1. It features elastomer-sealed digital thermal mass flow measurement and control, ensuring high accuracy and rapid response times. The controller is equipped with a 15-pin D-connector for electrical interfacing and supports various communication protocols, including analog outputs and digital communications. For detailed specifications and installation guidelines, please refer to the manufacturer's documentation.
Features:
Flow Range: 100 to 2500 SLPM
Turndown Ratio: 25:1
Accuracy: ±1.0% of rate (20% - 100% FS), ±0.2% FS (below 20% FS) up to 1100 SLPM
Response Time: Settling time of less than 1 second
Electrical Interface: 15-pin D-connector
Communication Protocols: Analog outputs, RS-485 digital communications
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The Brooks MF53S/A32RD2B3LA1B1 PR5F6417 is a high-performance mass flow controller designed for precise gas flow measurement and control in industrial applications.
